AZO/ITO conductive glass film coating production line

1.       Apply to coating transparent conductive film on TN, STN, TP, CF or resistive screen and capacitive screen. It can also coat front electrodes and back electrodes on thin film solar cell glass sheet etc.

2.       Size of coated substrate: 400*500, 550*670, 1100*1400, 2200*2800

3.       Equipment main parts:

a)         Vacuum chamber: vertical chamber with cooling water outside, made of 304 stainless steel;

b)        Vacuum system: molecular pumping system;

c)         Coating system: planar or rotary cathode with DC, MF magnetron sputtering power supply, closed loop control system;

d)        Heating system: stainless steel tubular heater to make sure heating uniformity;

e)         Charging system: high precision gas mass flow meter;

f)         Electric control system: industrial controller or PLC with independent intellectual property rights Chinese OA auto control softeware.